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CS Clean Systems AG
, Germany
CS CLEAN SYSTEMS is your reliable partner for exhaust gas abatement, with more than 20 years of experience serving the semiconductor industry, with a primary focus on dry bed absorption.
Product
Range
Description
CLEANSORB® SC- and DC-Series
The CLEANSORB® SC- and DC-Systems are designed around CLEANSORB® Absorber Columns employing CLEANSORB® Technology to purify process exhaust from hazardous gases at room temperature.
Application
Waste gas abatement for semiconductor processes
Industry
Data Communication, Defence Laboratories, Education & Research, Microelectronics, Opto Electronics, R & D, Semiconductor Fab, Semiconductors