Micro High Pressure Laser

Samples inert pressurized gases at their line pressures. This system outputs data to an external printer or computer. Speed qualification of process gas distribution systems Detect particles in gases before they impact yield System incorporates two devices: a sampling sensor and a data system Verify specifications Detect process upsets Quantify impact of system changes Accurate particle sizing Compatible with Facility Net data management system for comprehensive data storage, management, reports, and alarms Passive cavity design requires infrequent maintenance Unlike other systems, the Micro LPC-101 HP requires no fluids for monitoring Samples inert pressurized gases at their line pressure Improved Process Control Reliable

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