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Apex SLR

The Advanced Vacuum Apex SLR is a robust ICP technology based on Plasma-Therm’s proven Shuttlelock® platform now available in a much smaller footprint. The reliable hardware, ease of operation, and low cost make the Apex SLR ideal for a wide range of uniform, high quality ICP etch and HDP deposition applications serving R&D, prototyping, pilot line and low volume production. Backed by Plasma-Therm’s VLSI 15 year award winning service organization, the Apex SLR will be the most reliable and ‘always available’ tool on the floor.

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