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PICOPLATFORM™ Vacuum Cluster System

Picosun’s PICOPLATFORM™ vacuum cluster tools combine the unique scalability and modularity of all PICOSUN™ ALD systems with fully standardized automation solutions for high volume manufacturing with world leading process quality. The PICOPLATFORM™ system consists of several ALD reactors clustered around a central vacuum robot loading and controlling unit for automatic wafer handling without vacuum break. The system can also be extended at any time by clustering with other process units such as pre/post-treatment and deposition modules. PICOPLATFORM™ cluster system product family offers two alternatives: 1. PICOPLATFORM™ 200 vacuum cluster, which is ideal for R&D and smaller scale production. 2. PICOPLATFORM™ 300 vacuum cluster, which is optimized for fully automated high throughput Industrial manufacturing.