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VERSALINE RIE

Plasma-Therm’s VERSALINE RIE systems are installed in a wide range of production capacity facilities - from R&D through high-volume production. VERSALINE RIE offers low maintenance and high versatility for multiple applications. Substrate sizes are conveniently accommodated without ever needing hardware reconfiguration. For future upgradeability to ICP, a high conductance option is available.

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